An Electrothermal Actuator With Two Degrees of Freedom Serving as the Arm of a MEMS Gripper. - Dian-Sheng Chen; Po-Fan Yeh; Yu-Fan Chen; Chun-Wei Tsai; Chun-Yi Yin; Ren-Jie Lai; Jui-Che Tsai (IEEE Trans. Ind. Electron., 2014)