Phase Partition Based Virtual Metrology for Material Removal Rate Prediction in Chemical Mechanical Planarization Process. - Wenlan Jiang; Chunpu Lv; Tao Zhang 006; Huan-gang Wang (CICAI, 2021)

Material Removal Rate Prediction with Phase Sensitive Variables Selection and Phase Partition. - Chunpu Lv; Tao Zhang 006; Huangang Wang (ICAC, 2022)

Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization. - Chunpu Lv; Jingwei Huang; Ming Zhang 015; Huangang Wang; Tao Zhang 006 (Sensors, 2023)