Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators. - Sangwoo Lee; Sangjun Park 001; Sangwoo Yi; Sangchul Lee; Dong-Il Dan Cho; Byeoungju Ha; Yongsoo Oh; Cimoo Song (IROS, 1999)

Micromachined inertial sensors. - Cimoo Song; Byeoungju Ha; Sukhan Lee 001 (IROS, 1999)