A new experimental methodology using point deflection to quantify residual stress of thin polymer membrane materials in MEMS devices. - Sofiane Soulimane; Arnaud Pouydebasque; Sébastien Bolis; Fabrice Jacquet; Claudine Bridoux; Florian Dupont; Christophe Poulain; Stéphane Moreau; Stephane Fanget (NEMS, 2013)