A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement. - Wendi Gao; Cunlang Liu; Xiangguang Han; Libo Zhao 001; Qijing Lin; Zhuangde Jiang; Dong Sun 001 (IEEE Trans. Ind. Electron., 2023)