Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing. - Jules Tillement; Cyril Cervera; Jacques Baylet; Christophe Jany; François Nardelli; Thomas Di Rito; Sylvain Georges; Gabriel Mugny; Olivier Saxod; Olivier Gravrand; Thierry Baron; François Roy; et al. (Sensors, 2023)