Application of micro-Raman spectroscopy for the evaluation of doping profile in Zn delta-doped GaAs structures. - R. Srnánek; G. Irmer; D. Donoval; J. Osvald; D. Mc Phail; A. Christoffi; B. Sciana; D. Radziewicz; M. Tlaczala (Microelectron. J., 2008)