Nano-artifact metrics based on random collapse of resist. - Tsutomu Matsumoto; Morihisa Hoga; Yasuyuki Ohyagi; Mikio Ishikawa; Makoto Naruse; Kenta Hanaki; Ryosuke Suzuki; Daiki Sekiguchi; Naoya Tate; Motoichi Ohtsu (CoRR, 2014)