Implementing virtual metrology for in-line quality control in semiconductor manufacturing. - Jason Chao-Hsien Pan; Damon H. E. Tai (Int. J. Syst. Sci., 2009)

A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication. - Jason Chao-Hsien Pan; Damon H. E. Tai (Comput. Ind. Eng., 2011)