C-Axis Textured, 2-3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications. - Asaf Cohen 005; Hagai Cohen; Sidney R. Cohen; Sergey Khodorov; Yishay Feldman; Anna Kossoy; Ifat Kaplan-Ashiri; Anatoly I. Frenkel; Ellen Wachtel; Igor Lubomirsky; David Ehre (Sensors, 2022)