Wafer fabrication: 300mm wafer fabrication line simulation model. - Sameer T. Shikalgar; David Fronckowiak; Edward A. MacNair (WSC, 2002)

Process equipment modeling: resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing. - Nirmal Govind; David Fronckowiak (WSC, 2003)

Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation. - Sameer T. Shikalgar; David Fronckowiak; Edward A. MacNair (WSC, 2003)