Middle-of-the-Line Reliability Characterization of Recessed-Diffusion-Contact Adopted sub-5nm Logic Technology. - Seongkyung Kim; Ukjin Jung; Seungjin Choo; Kihyun Choi; Tae-Jin Chung; Shin-Young Chung; Euncheol Lee; Juhun Park; Deokhan Bae; Myungyoon Um (IRPS, 2022)