All-Si Metasurface Polarizing Bandpass Filter Mass Produced on 12 Inch Wafer. - Zhengji Xu; Yuan Dong; Chi Kuo Tseng; Ting Hu; Jinchao Tong; Qize Zhong; Larry Sim; Keng Heng Lai; Ying Lin; Dongdong Li; Yu Li; Vladimir Bliznetsov; et al. (OFC, 2019)