A virtual equipment as a test bench for evaluating virtual metrology algorithms. - Andreas Mattes; Matthias Koitzsch; Dirk Lewke; Michael Müller-Zell; Martin Schellenberger (WSC, 2011)

Direct optical stress sensing in semiconductor manufacturing using Raman micro-spectrometry. - Martin De Biasio; Martin Kraft; Michael Roesner; Christoph Bergmann; Maria Mercedes Cerezuela-Barreto; Dirk Lewke; Martin Schellenberger (IEEE SENSORS, 2016)