IR confocal laser microscopy for MEMS Technological Evaluation. - Djemel Lellouchi; Felix Beaudoin; Christophe Le Touze; Philippe Perdu; Romain Desplats (Microelectron. Reliab., 2002)

The advent of MEMS in space. - Xavier Lafontan; Francis Pressecq; Felix Beaudoin; Sebastien Rigo; M. Dardalhon; J.-L. Roux; Petra Schmitt; J. Kuchenbecker; B. Baradat; Djemel Lellouchi (Microelectron. Reliab., 2003)

FTIR spectroscopy for the hermeticity assessment of micro-cavities. - David Veyrié; Djemel Lellouchi; J.-L. Roux; Francis Pressecq; Angie Tetelin; Claude Pellet (Microelectron. Reliab., 2005)