14nm DRAM Development and Manufacturing. - Kanguk Kim; Youngwoo Son; Hoin Ryu; Byunghyun Lee; Jooncheol Kim; Hyunsu Shin; Joonyoung Kang; Jihun Kim; Shinwoo Jeong; Kyosuk Chae; Dongkak Lee; Ilwoo Jung; et al. (VLSI Technology and Circuits, 2023)