Doping-Optimized Back-illuminated Single-Photon Avalanche Diode in Stacked 40 nm CIS Technology Achieving 60% PDP at 905 nm. - Eunsung Park; Won-Yong Ha; Doyoon Eom; Dae-Hwan Ahn; Hyuk An; Suhyun Yi; Kyung-Do Kim; Jongchae Kim; Woo-Young Choi; Myung-Jae Lee (VLSI Technology and Circuits, 2023)