Process models and network complexity. - Edward A. Rietman; Robert C. Frye; Earl R. Lory (ICNN, 1993)

Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing. - Edward A. Rietman; Suresh H. Patel; Earl R. Lory (Comput. Oper. Res., 1996)