Investigation of the influence of thermal treatment on interconnect-barrier interfaces in copper metallization systems. - Oliver Aubel; Eberhard Bugiel; Dietmar Krüger; Wolfgang Hasse; Martina Hommel (Microelectron. Reliab., 2006)

PECVD grown Ge nanocrystals embedded in SiO2: From disordered to templated self-organization. - Robby Peibst; T. Dürkop; Eberhard Bugiel; Namil Koo; Thomas Mollenhauer; Max Christian Lemme; Heinrich Kurz; Karl R. Hofmann (Microelectron. J., 2009)