A utility-based integrated system for process simulation. - Edward W. Scheckler; Alexander S. Wong; Robert K. Wang; Goodwin R. Chin; John R. Camagna; Andrew R. Neureuther; Robert W. Dutton (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1992)

An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. - Edward W. Scheckler; Nelson N. Tam; Anton K. Pfau; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1993)

Models and algorithms for three-dimensional topography simulation with SAMPLE-3D. - Edward W. Scheckler; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1994)

Algorithms for simulation of three-dimensional etching. - Kenny K. H. Toh; Andrew R. Neureuther; Edward W. Scheckler (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1994)