Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing OPC Using Inner and Outer via Chain Dummy Patterns. - Takashi Nasuno; Yoshihisa Matsubara; Hiromasa Kobayashi; Akiyuki Minami; Eiichi Soda; Hiroshi Tsuda; Koichiro Tsujita; Wataru Wakamiya; Nobuyoshi Kobayashi (IEICE Trans. Electron., 2005)