Wideband MOEMS for the Calibration of Optical Readout Systems. - Petr V. Volkov; Andrey Lukyanov; Alexander V. Goryunov; Daniil Semikov; Evgeniy Vopilkin; Stanislav Kraev; Andrey Okhapkin; Anatoly Tertyshnik; Ekaterina Arkhipova (Sensors, 2021)