Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies. - Mauro Ciappa; Emre Ilgünsatiroglu; Alexey Yu. Illarionov (Microelectron. Reliab., 2012)

Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications. - Emre Ilgünsatiroglu; Alexey Yu. Illarionov; Mauro Ciappa (Microelectron. Reliab., 2013)

Monte Carlo modeling of the extraction of roughness parameters at nanometer scale by Critical Dimension Scanning Electron Microscopy. - Mauro Ciappa; Emre Ilgünsatiroglu; Alexey Yu. Illarionov; F. Filosomi; C. Santini (ESSDERC, 2014)

Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields. - Mauro Ciappa; Alexey Yu. Illarionov; Emre Ilgünsatiroglu (Microelectron. Reliab., 2014)

Exploring the limits of scanning electron microscopy for the metrology of critical dimensions of photoresist structures in the nanometer range. - Mauro Ciappa; Emre Ilgünsatiroglu; Alexey Yu. Illarionov (Microelectron. Reliab., 2014)