A 0.5 mm2 integrated capacitive vibration sensor with sub-10 zF/rt-Hz noise floor. - Sitaraman V. Iyer; Hasnain Lakdawala; Rajarishi S. Sinha; Eric J. Zacherl; Richard T. Unetich; Daniel M. Gaugel; David F. Guillou; L. Richard Carley (CICC, 2005)