Analysis of air damping in micromachined resonators. - Guoqiang Wu; Dehui Xu; Bin Xiong; Yinglei Ma; Yuelin Wang; Errong Jing (NEMS, 2012)

Characterization of wafer-level XeF2 Gas-phase Isotropic Etching For MEMS Processing. - Dehui Xu; Bin Xiong; Guoqiang Wu; Yinglei Ma; Yuelin Wang; Errong Jing (NEMS, 2012)