Optimization of SiNX: H films deposited by PECVD for reliability of electronic, microsystems and optical applications. - Etienne Herth; Bernard Legrand; Lionel Buchaillot; Nathalie Rolland; Tuami Lasri (Microelectron. Reliab., 2010)

Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications. - Etienne Herth; H. Desré; Emmanuelle Algré; Christiane Legrand; Tuami Lasri (Microelectron. Reliab., 2012)

Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory. - Nikolay Smagin; Meddy Vanotti; Marc Duquennoy; Lionel Rousseau; Hassan Alhousseini; Virginie Blondeau-Patissier; Mohammadi Ouaftouh; Laurie Valbin; Etienne Herth (Sensors, 2022)