Qualification and Quantification of Process-Induced Product-Related Defects. - F. Camerik; P. A. J. Dirks; Jochen A. G. Jess (ITC, 1989)

A Generic Method to Develop a Defect Monitoring System for IC Processes. - Eric Bruls; F. Camerik; H. J. Kretschman; Jochen A. G. Jess (ITC, 1991)