High Performance Thermally Resistant FinFETs DRAM Peripheral CMOS FinFETs with VTH Tunability for Future Memories. - Romain Ritzenthaler; Elena Capogreco; E. Dupuy; Hiroaki Arimura; J. P. Bastos; P. Favia; F. Sebaai; D. Radisic; V. T. H. Nguyen; G. Mannaert; B. T. Chan; V. Machkaoutsan; et al. (VLSI Technology and Circuits, 2022)

Demonstration of 3D sequential FD-SOI on CMOS FinFET stacking featuring low temperature Si layer transfer and top tier device fabrication with tier interconnections. - A. Vandooren; N. Parihar; Jacopo Franco; Roger Loo; Hiroaki Arimura; R. Rodriguez; F. Sebaai; S. Iacovo; Kevin Vandersmissen; W. Li; G. Mannaert; D. Radisic; et al. (VLSI Technology and Circuits, 2022)

Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails. - Anabela Veloso; Anne Jourdain; D. Radisic; Rongmei Chen; G. Arutchelvan; B. O'Sullivan; Hiroaki Arimura; Michele Stucchi; An De Keersgieter; M. Hosseini; T. Hopf; K. D'Have; et al. (VLSI Technology and Circuits, 2022)

Nanosheet-based Complementary Field-Effect Transistors (CFETs) at 48nm Gate Pitch, and Middle Dielectric Isolation to enable CFET Inner Spacer Formation and Multi-Vt Patterning. - Hans Mertens; M. Hosseini; Thomas Chiarella; D. Zhou; S. Wang; G. Mannaert; E. Dupuy; D. Radisic; Z. Tao; Yusuke Oniki; Andriy Hikavyy; R. Rosseel; et al. (VLSI Technology and Circuits, 2023)

Monolithic Complementary Field Effect Transistors (CFET) Demonstrated using Middle Dielectric Isolation and Stacked Contacts. - Steven Demuynck; Victor Vega-Gonzalez; C. Toledo de Carvalho Cavalcante; L. Petersen Barbosa Lima; K. Stiers; C. Sheng; A. Vandooren; M. Hosseini; X. Zhou; Hans Mertens; Thomas Chiarella; Jürgen Bömmels; et al. (VLSI Technology and Circuits, 2024)

Backside Power Delivery with relaxed overlay for backside patterning using extreme wafer thinning and Molybdenum-filled slit nano Through Silicon Vias. - P. Zhao; Liesbeth Witters; Anne Jourdain; Michele Stucchi; Nicolas Jourdan 002; J. W. Maes; H. Bana; C. Zhu; R. Chukka; F. Sebaai; Kevin Vandersmissen; N. Heylen; et al. (VLSI Technology and Circuits, 2024)