High-Resolution Detection of Microwave Fields on Chip Surfaces Based on Scanning Microwave Microscopy. - Tao Pei; Fan Cheng 005; Xu Dong Jia; Zhong Hao Li; Hao Guo; Huan Fei Wen; Yan Jun Li; Jun Tang 005; Jun Liu 005 (IEEE Trans. Instrum. Meas., 2023)