Thickness Measurement Based on Eddy Current Sensor With Coaxial Double Coil for Chemical Mechanical Polishing. - Chengxin Wang; Tongqing Wang; Fangxin Tian; Xinchun Lu (IEEE Trans. Instrum. Meas., 2022)

Metal Thickness Measurement System Based on a Double-Coil Eddy-Current Method With Characteristic Ratio Detection. - Chengxin Wang; Tongqing Wang; Bangxu Liu; Fangxin Tian; Xinchun Lu (IEEE Trans. Ind. Electron., 2023)