Etching process prediction based on cascade recurrent neural network. - Zhenjie Yao; Ziyi Hu; Panpan Lai; Fengling Qin; Wenrui Wang; Zhicheng Wu; Lingfei Wang; Hua Shao; Yongfu Li; Zhiqiang Li; Zhongming Liu; Junjie Li; et al. (Eng. Appl. Artif. Intell., 2025)