Measurement of micro gears: comparison of optical, tactile-optical, and CT measurements. - Ulrich Neuschaefer-Rube; Markus Bartscher; Marko Neukamm; Michael Neugebauer; Frank Härtig; Jürgen Goebbels; Karsten Ehrig; Andreas Staude (Three-Dimensional Imaging, Interaction, and Measurement, 2011)

Reducing the probe ball diameters of 3D silicon-based microprobes for dimensional metrology. - N. Ferreira; A. Brennecke; Andreas Dietzel; Stephanus Büttgenbach; Thomas Krah; David Metz 002; Karin Kniel; Frank Härtig (ICST, 2013)

Coordinate measurement on wafer level - From single sensors to sensor arrays. - Thomas Krah; Achim Wedmann; Karin Kniel; Frank Härtig; N. Ferreira; Stephanus Büttgenbach (ICST, 2013)

Herausforderungen und Lösungsansätze zur einheitlichen Kommunikation von Messdaten für Industrie 4.0 und das Internet of Things. - Bernd Müller; Frank Härtig (HMD Prax. Wirtsch., 2015)

Fundamental Physical Constants Ready for Machine Communication in a Digitalized World. - Daniel Hutzschenreuter; Henrike Weber; Shanna Schönhals; Shan Lin; Frank Härtig; Bojan Acko (MetroInd4.0&IoT, 2020)