Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes. - Jinglin Shi; A. Sidelnicov; Kok Wai J. Chew; Mei See Chin; C. Schippel; J. M. M. dos Santos; Frank Schlaphof; Lutz Meinshausen; John R. Long; David L. Harame (ESSDERC, 2018)

BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms. - Betting Wehring; Raik Hoffmann; Lukas Gerlich; Malte Czernohorsky; Benjamin Uhlig; Robert Seidel; Tobias Barchewitz; Frank Schlaphof; Lutz Meinshausen; Christoph Leyens (IRPS, 2020)