Design for Manufacturing in the Semiconductor Industry: The Litho/Design Workshops. - Franklin M. Schellenberg (VLSI Design, 1999)

Adoption of OPC and the Impact on Design and Layout. - Franklin M. Schellenberg; Olivier Toublan; Luigi Capodieci; Bob Socha (DAC, 2001)

Impact of RET on physical layouts. - Franklin M. Schellenberg; Luigi Capodieci (ISPD, 2001)

Modeling and Computational Lithography. - Franklin M. Schellenberg (Handbook of Algorithms for Physical Design Automation, 2008)