Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. - Frédéric Marty; Lionel Rousseau; Bassam Saadany; B. Mercier; Olivier Français; Y. Mita; Tarik Bourouina (Microelectron. J., 2005)

Electrostatically-Driven Resonator on Soi with Improved Temperature Stability - Archit Giridhar; Fabrice Verjus; Frédéric Marty; Alain Bosseboeuf; Tarik Bourouina (CoRR, 2007)

A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism - Ayyaz Mahmood Paracha; Philippe Basset; Frédéric Marty; Adrian Vaisman Chasin; Patrick Poulichet; Tarik Bourouina (CoRR, 2008)

Robust multi-parameter sensing probe for water monitoring based on ALD-coated metallic micro-patterns. - Ferdous Shaun; Massimo Pellegrino; William Cesar; Frédéric Marty; Zhifei Xu; Martine Capo-Chichi; Philippe Basset; Bérengère Lebental; Tarik Bourouina (NEMS, 2016)

Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry - Design, Simulation, and Experimental Performance Assessment. - Noha Gaber; Yasser M. Sabry; Frédéric Marty; Tarik Bourouina (Micromachines, 2016)

A Low-Cost Collective 3D-Polymer Structure for Passive Optical Coupling of Low-Dimensions and High-Speed VCSEL. - Jean-Luc Polleux; Carlos Viana; Frédéric Marty; Nicolas Pavy (ECOC, 2018)

On-Channel Integrated Optofluidic Pressure Sensor with Optically Boosted Sensitivity. - Noha Gaber; Ahmad Altayyeb; Sherif A. Soliman; Yasser M. Sabry; Frédéric Marty; Tarik Bourouina (Sensors, 2019)

Artificial intelligence and consumer manipulations: from consumer's counter algorithms to firm's self-regulation tools. - Nathalie De Marcellis-Warin; Frédéric Marty; Eva Thelisson; Thierry Warin (AI Ethics, 2022)

Mid-Infrared Wavelength-Selective Absorbing Metasurfaces Based on Highly-doped Silicon Gratings. - Kirollos Ernest Matta; Sreyash Sarkar; Ahmed Elsayed; Frédéric Marty; Armande Hervé; Mazen Erfan; Diaa A. Khalil; Yasser M. Sabry; Elyes Nefzaoui; Tarik Bourouina (ICM, 2024)