Effects of a Thermal CVD SiN Passivation Film on AlGaN/GaN HEMTs. - Toshiharu Marui; Shinichi Hoshi; Masanori Itoh; Isao Tamai; Fumihiko Toda; Hideyuki Okita; Yoshiaki Sano; Shouhei Seki (IEICE Trans. Electron., 2008)

Comparisons of SiN Passivation Film Deposited by PE-CVD and T-CVD Method for AlGaN/GaN HEMTs on SiC Substrate. - Hideyuki Okita; Toshiharu Marui; Shinichi Hoshi; Masanori Itoh; Fumihiko Toda; Yoshiaki Morino; Isao Tamai; Yoshiaki Sano; Shouhei Seki (IEICE Trans. Electron., 2009)