A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With ±6 m/s Linear Range. - Wei Xu 049; Zhijuan Li; Zetao Fang; Bo Wang 012; Linze Hong; Gai Yang; Su-Ting Han; Xiaojin Zhao; Xiaoyi Wang (IEEE J. Solid State Circuits, 2024)