First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP. - Gayle Murdoch; Matin O'Toole; Giulio Marti; Ankit Pokhrel; Diana Tsvetanova; Stefan Decoster; Shreya Kundu; Yusuke Oniki; Arame Thiam; Quoc Toan Le; Olalla Varela Pedreira; Alicja Lesniewska; et al. (VLSI Technology and Circuits, 2022)