Stochastic modeling of film porosity in thin film deposition. - Gangshi Hu; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2009)

Model predictive control of film porosity in thin film deposition. - Gangshi Hu; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2009)

Simultaneous regulation of film thickness, surface roughness and porosity in a multiscale thin film growth process. - Gangshi Hu; Xinyu Zhang; Gerassimos Orkoulas; Panagiotis D. Christofides (CDC, 2009)

An Overview of Monte Carlo Methods for Fluid Simulation. - Gerassimos Orkoulas (Comput. Sci. Eng., 2009)

Simultaneous regulation of thin film surface mean slope and roughness for light trapping optimization using predictive control. - Xinyu Zhang; Gangshi Hu; Gerassimos Orkoulas; Panagiotis D. Christofides (CDC, 2010)

Dependence of film surface roughness on surface migration and lattice size in thin film deposition. - Jianqiao Huang; Gangshi Hu; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2011)

Multivariable model predictive control of thin film surface roughness and slope: Application to a 2D kinetic Monte-Carlo model. - Xinyu Zhang; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2011)

Modeling and control of aggregate thin film surface morphology using stochastic PDEs and a patterned deposition rate profile. - Xinyu Zhang; Jianqiao Huang; Gerassimos Orkoulas; Panagiotis D. Christofides (CDC/ECC, 2011)

Predictive control of aggregate surface morphology in a two-stage thin film deposition process for improved light trapping. - Jianqiao Huang; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2012)

Porosity control in thin film solar cells: Two-dimensional case. - Jianqiao Huang; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2013)

Modeling and control of protein crystal shape distribution. - Michael Nayhouse; Joseph Sang-Il Kwon; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2013)

Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor. - Matthew Tom; Sungil Yun; Henrik Wang; Feiyang Ou; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2022)

Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching. - Sungil Yun; Matthew Tom; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2022)

Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design. - Sungil Yun; Matthew Tom; Feiyang Ou; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2022)

Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation. - Matthew Tom; Henrik Wang; Feiyang Ou; Sungil Yun; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2023)

Machine Learning-Based Endpoint-Detection Control System for an Atomic Layer Etching Process. - Henrik Wang; Feiyang Ou; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2025)