Two-dimensional modeling of ion implantation induced point defects. - Gerhard Hobler; Siegfried Selberherr (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1988)

Monte Carlo simulation of ion implantation into two- and three-dimensional structures. - Gerhard Hobler; Siegfried Selberherr (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1989)