Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control. - Junmo Koo; Daegeun Ha; Damdae Park; Hyun-Joon Roh; Sangwon Ryu; Gon-Ho Kim; Kye Hyun Baek; Chonghun Han (Comput. Chem. Eng., 2017)

Design of a self-tuning adaptive model predictive controller using recursive model parameter estimation for real-time plasma variable control. - Junmo Koo; Damdae Park; Sangwon Ryu; Gon-Ho Kim; Youn-Woo Lee (Comput. Chem. Eng., 2019)

Sparse Bayesian long short-term memory networks for computationally efficient stochastic modeling of plasma etch processes. - Damdae Park; Sangwon Ryu; Gon-Ho Kim; Jong Min Lee 002 (Comput. Chem. Eng., 2022)