Mind the Generation Process: Fine-Grained Confidence Estimation During LLM Generation. - Jinyi Han; Tingyun Li; Shisong Chen; Jie Shi; Xinyi Wang; Guanglei Yue; Jiaqing Liang; Xin Lin 001; Liqian Wen; Zulong Chen; Yanghua Xiao (CoRR, 2025)