Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams. - Mingzhi Yu; Libo Zhao 001; Xiangguang Han; Chen Jia; Yong Xia; Ping Yang; Yun Zhang; Junjie Sun; Guangzhao Qin; Zhuangde Jiang (IEEE Trans. Ind. Electron., 2023)