Performance comparison of methods to evading notching effect for SOG structures in DRIE. - Haitao Ding; Zhenchuan Yang; Guizhen Yan (NEMS, 2009)

An improved method to remove anti-footing Al layer after DRIE. - Yuan Li; Zhenchuan Yang; Guizhen Yan (NEMS, 2009)

The method of prevent footing effect in making SOI micro-mechanical structure. - Xu Mao; Zhenchuan Yang; Zhihong Li; Guizhen Yan (NEMS, 2009)

Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer. - Qifang Hu; Chengchen Gao; Yilong Hao; Dacheng Zhang; Guizhen Yan; Yangxi Zhang (NEMS, 2010)

Design and fabrication of a novel silicon probe for micromachined surface profilers. - Senlin Jiang; Dacheng Zhang; Zhenchuan Yang; Guizhen Yan (NEMS, 2010)

An FPGA implementation of the LMS adaptive filter for MEMS gyroscope. - Niannian Lu; Dachuan Liu; Jian Cui; Longtao Lin; Xiaozhu Chi; Zhenchuan Yang; Guizhen Yan (NEMS, 2010)

Residual stress characterization of GaN microstructures using bent-beam strain sensors. - Jianan Lv; Zhenchuan Yang; Guizhen Yan; Yong Cai; Baoshun Zhang; Kevin J. Chen (NEMS, 2010)

Fabrication of ultra-deep high-aspect-ratio isolation trench without void and its application. - Liang Qian; Jia Wang; Zhenchuan Yang; Guizhen Yan (NEMS, 2010)

Fabrication of Sub-100-nm silicon nanowire devices on SOI wafer by CMOS compatible fabrication process. - Lina Sun; T. Ming-Hung Lee; Zhenchuan Yang; Guizhen Yan (NEMS, 2010)

A single mask dry releasing process for making high aspect ratio soimemsdevices. - Yumin Wei; Xu Mao; Zhenchuan Yang; Guizhen Yan (NEMS, 2010)

Improvement of transient response for drive loop of microgyroscope using 2-DOF PID controller. - Jian Cui; Zhongyang Guo; Zhenchuan Yang; Yilong Hao; Guizhen Yan (NEMS, 2011)

A method to reduce notching effect on the anchors of a micro-gyroscope. - Peizhen Hong; Zhongyang Guo; Zhenchuan Yang; Guizhen Yan (NEMS, 2011)

Fabrication and testing of a novel silicon probe for micromachined surface profilers. - Senlin Jiang; Dacheng Zhang; Longtao Lin; Zhenchuan Yang; Guizhen Yan (NEMS, 2011)

Digital closed-loop controller design of a micromachined gyroscope based on auto frequency swept. - Longtao Lin; Dachuan Liu; Jian Cui; Zhongyang Guo; Zhenchuan Yang; Guizhen Yan (NEMS, 2011)

CMOS compatible process for suspended high-aspect-ratio integrated silicon microstructures. - Liang Qian; P. Z. Hong; Lina Sun; Zhenchuan Yang; Guizhen Yan (NEMS, 2011)

Post CMOS integration of high aspect ratio SOI MEMS devices. - Lina Sun; Liang Qian; P. Z. Hong; Guizhen Yan; Zhenchuan Yang (NEMS, 2011)

A novel acceleration switch with hat-like contact separated from proof mass. - Xiaoyang Zhang; Zhongyang Guo; Longtao Lin; Qiancheng Zhao; Junjie Yan; Zhenchuan Yang; Guizhen Yan (NEMS, 2011)

Fast self-resonant startup procedure for digital MEMS gyroscope system. - Fei Ge; Dachuan Liu; Longtao Lin; Zhenchuan Yang; Guizhen Yan (NEMS, 2012)

A research of the bandwidth of a mode-matching MEMS vibratory gyroscope. - Chunhua He; Qiancheng Zhao; Jian Cui; Zhenchuan Yang; Guizhen Yan (NEMS, 2012)

A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors. - Jiankun Wang 006; Zhenchuan Yang; Guizhen Yan (NEMS, 2012)

A capacitive readout circuit with DC sensing method for micromachined gyroscopes. - Kailong Zhou; Lina Sun; Fei Ge; Zhenchuan Yang; Guizhen Yan (NEMS, 2012)

Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm. - Yuxian Liu; Chunhua He; Dachuan Liu; Zhenchuan Yang; Guizhen Yan (NEMS, 2013)

MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator. - Haitao Ding; Zhenchuan Yang; Zhanfei Wang; Michael Kraft; Guizhen Yan (Sci. China Inf. Sci., 2013)

Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope. - Yuxian X. Liu; Weilei L. Feng; Chunhua H. He; Long Wang; Liguo G. Dong; Qiancheng C. Zhao; Zhenchuan C. Yang; Guizhen Yan (NEMS, 2014)

Digital fast startup procedure for micro-machined vibratory gyroscopes using optimized fuzzy control strategy. - Long Wang; Qiancheng Zhao; Minghao Nie; Dachuan Liu; Yuxian Liu; Junjie Yan; Zhenchuan Yang; Guizhen Yan (NEMS, 2014)

A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructures. - Liang Qian; Zhenchuan Yang; Guizhen Yan (Sci. China Inf. Sci., 2014)

Designing of a micromachined gyroscope system with a closed-loop DC biased interface ASIC. - Tingting Tao; Wengao Lu; Ran Fang; Yacong Zhang; Zhongjian Chen; Guizhen Yan (Sci. China Inf. Sci., 2014)

A temperature control system used for improving resonant frequency drift of MEMS gyroscopes. - Rui Guan; Chunhua He; Dachuan Liu; Qiancheng Zhao; Zhenchuan Yang; Guizhen Yan (NEMS, 2015)

Research on the resonant frequency of MEMS gyroscopes under varying tuning voltage. - Ruixuan Yan; Xianglei Wei; Chunhua He; Qiancheng Zhao; Zhenchuan Yang; Guizhen Yan (NEMS, 2015)

A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer. - Jun You; Dayu Tian; Chunhua He; Qiancheng Zhao; Zhenchuan Yang; Dacheng Zhang; Guizhen Yan (NEMS, 2015)

A novel scale factor calibration method for a MEMS gyroscope based on virtual coriolis force. - Jimeng Zhang; Chunhua He; Yuxian Liu; Dachuan Liu; Qiancheng Zhao; Zhenchuan Yang; Guizhen Yan (NEMS, 2015)

Investigation of reliability of MEMS gyroscopes under different shock conditions. - Pan Zhang; Chunhua He; Jimeng Zhang; Qiancheng Zhao; Zhenchuan Yang; Dacheng Zhang; Guizhen Yan (NEMS, 2015)

A novel method to measure the sidewall angle of MEMS structures. - Qiang Qin; Qiancheng Zhao; Fang Yang; Dacheng Zhang; Guizhen Yan (IEEE SENSORS, 2017)

Research on the Zero-Rate Output compensation for MEMS vibratory gyroscopes. - Tong Liu; Chunhua He; Qiancheng Zhao; Zhenchuan Yang; Guizhen Yan; Yufeng Jin (NEMS, 2017)

Research on the ring-diode based readout circuit for MEMS vibratory gyroscopes. - Xianglei Wei; Chunhua He; Qiancheng Zhao; Zhenchuan Yang; Guizhen Yan (NEMS, 2017)

An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control. - Chunhua He; Jimeng Zhang; Qiancheng Zhao; Qinwen Huang; Zhenchuan Yang; Dacheng Zhang; Guizhen Yan (Sci. China Inf. Sci., 2017)

A Low-Noise High-G Closed-Loop Capacitive Accelerometer Using DC-Blocking Technique for Reduction of Power Dissipation. - Meng Zhao; Qiancheng Zhao; Zhongjian Chen; Wengao Lu; Yacong Zhang; Guizhen Yan (ISCAS, 2018)

An Interface ASIC for an Atmospheric-Pressure MEMS Gyroscope with PLL-Based Phase Adjustment and SC Amplitude Regulation. - Meng Zhao; Qiancheng Zhao; Wengao Lu; Guizhen Yan (ISCAS, 2020)

A 0.084% Nonlinearity Open-Loop Capacitive Micro-Accelerometer with On-Chip Digital Nonlinearity Calibration and Embedded EEPROM. - Meng Zhao; Qiancheng Zhao; Zhongjian Chen; Wengao Lu; Yacong Zhang; Guizhen Yan (ISCAS, 2021)

A Noncontact Fall Detection Method for Bedside Application With a MEMS Infrared Sensor and a Radar Sensor. - Chunhua He; Shuibin Liu; Guangxiong Zhong; Heng Wu 002; Lianglun Cheng; Guizhen Yan; Yangxing Wen (IEEE Internet Things J., 2023)

A Side-Channel Hardware Trojan Detection Method Based on Fuzzy C-Means Clustering and Fusion Distance Algorithms. - Chunhua He; Dengyun Lei; Heng Wu 002; Lianglun Cheng; Guizhen Yan; Qinwen Huang (IEEE Internet Things J., 2024)

Noise Analysis and Suppression Methods for the Front-End Readout Circuit of a Microelectromechanical Systems Gyroscope. - Chunhua He; Yingyu Xu; Xiaoman Wang; Heng Wu 002; Lianglun Cheng; Guizhen Yan; Qinwen Huang (Sensors, 2024)