The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films. - M. Guerino; Marcos Massi; H. S. Maciel; C. Otani; Ronaldo Domingues Mansano (Microelectron. J., 2003)

Plasma etching of DLC films for microfluidic channels. - Marcos Massi; J. M. J. Ocampo; H. S. Maciel; K. Grigorov; C. Otani; L. V. Santos; Ronaldo Domingues Mansano (Microelectron. J., 2003)