A 1.33Tb 4-bit/Cell 3D-Flash Memory on a 96-Word-Line-Layer Technology. - Noboru Shibata; Kazushige Kanda; Takahiro Shimizu; Jun Nakai; Osamu Nagao; Naoki Kobayashi 004; Makoto Miakashi; Yasushi Nagadomi; Takeshi Nakano; Takahisa Kawabe; Taira Shibuya; Mario Sako; et al. (ISSCC, 2019)