A 0.6V 625um2 Fully Stacked RC-Based Temperature Sensor Using Low TCR Metal Resistor Achieving 0.017nJ.%2-Accuracy FoM in 2nm Gate-All-Around Process. - Haejung Choi; Jooseong Kim; Woojoong Jung; Sungmin Yoo; Jun-Hyeok Yang; Sunghyuck Lee; Jihye Park; Michael Choi; Ben Rhew (ISSCC, 2026)