Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration. - Rui Hao; Huijun Yu; Bei Peng 002; Haixiang Zhan; Wu Zhou 003 (Sensors, 2020)

A High-Resolution Optical Displacement Detection Method for Piezoelectric Microvibratory Stage. - Haixiang Zhan; Wu Zhou 003; Longqi Ran; Huijun Yu; Bei Peng 002; Rui Hao (IEEE Trans. Ind. Electron., 2020)