Characterization of Nitride Passivated Cu Surface for Low-Temperature Cu-Cu Bonding. - Hae-Sung Park; Han Kyeol Seo; Sarah Eunkyung Kim (3DIC, 2019)

Effects of Argon and Nitrogen ion Bombardments on Sputtered and Electroplated Cu Surfaces for Cu Bonding Application. - Han Kyeol Seo; Hae-Sung Park; Sarah Eunkyung Kim (3DIC, 2019)