An analytic Volterra-series-based model for a MEMS variable capacitor. - Manuel Innocent; Piet Wambacq; Stéphane Donnay; Harrie A. C. Tilmans; Willy M. C. Sansen; Hugo De Man (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 2003)

MEMS packaging and reliability: An undividable couple. - Harrie A. C. Tilmans; Jeroen De Coster; Philippe Hélin; Vladimir Cherman; Anne Jourdain; Piet De Moor; Bart Vandevelde; Nga P. Pham; Joseph Zekry; Ann Witvrouw; Ingrid De Wolf (Microelectron. Reliab., 2012)

Challenges of monolithic integration for SiGe MEMS technology. - Ashesh Ray Chaudhuri; Simone Severi; Philippe Hélin; Laurent A. Francis; Harrie A. C. Tilmans (IEEE SENSORS, 2016)